Ebook456 pages10 hours
Plasma Processing for VLSI
Rating: 5 out of 5 stars
5/5
()
About this ebook
VLSI Electronics: Microstructure Science, Volume 8: Plasma Processing for VLSI (Very Large Scale Integration) discusses the utilization of plasmas for general semiconductor processing. It also includes expositions on advanced deposition of materials for metallization, lithographic methods that use plasmas as exposure sources and for multiple resist patterning, and device structures made possible by anisotropic etching.
This volume is divided into four sections. It begins with the history of plasma processing, a discussion of some of the early developments and trends for VLSI. The second section, Deposition, discusses deposition techniques for VLSI such as sputtering metals for metallization and contacts, plasma-enhanced chemical vapor deposition of metals and suicides, and plasma enhanced chemical vapor deposition of dielectrics. The part on Lithography presents the high-resolution trilayer resist system, pulsed x-ray sources for submicrometer x-ray lithography, and high-intensity deep-UV sources. The last part, Etching, provides methods in etching, like ion-beam etching using reactive gases, low-pressure reactive ion etching, and the uses of inert-gas ion milling. The theory and mechanisms of plasma etching are described and a number of new device structures made possible by anisotropic etching are enumerated as well.
Scientists, engineers, researchers, device designers, and systems architects will find the book useful.
This volume is divided into four sections. It begins with the history of plasma processing, a discussion of some of the early developments and trends for VLSI. The second section, Deposition, discusses deposition techniques for VLSI such as sputtering metals for metallization and contacts, plasma-enhanced chemical vapor deposition of metals and suicides, and plasma enhanced chemical vapor deposition of dielectrics. The part on Lithography presents the high-resolution trilayer resist system, pulsed x-ray sources for submicrometer x-ray lithography, and high-intensity deep-UV sources. The last part, Etching, provides methods in etching, like ion-beam etching using reactive gases, low-pressure reactive ion etching, and the uses of inert-gas ion milling. The theory and mechanisms of plasma etching are described and a number of new device structures made possible by anisotropic etching are enumerated as well.
Scientists, engineers, researchers, device designers, and systems architects will find the book useful.
Related to Plasma Processing for VLSI
Titles in the series (17)
VLSI Electronics Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics: Microstructure Science Rating: 0 out of 5 stars0 ratingsMaterials and Process Characterization Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5VLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5Surface and Interface Effects in VLSI Rating: 5 out of 5 stars5/5Plasma Processing for VLSI Rating: 5 out of 5 stars5/5GaAs Microelectronics: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI Design Rating: 5 out of 5 stars5/5VLSI Metallization Rating: 5 out of 5 stars5/5Metal – Semiconductor Contacts and Devices Rating: 0 out of 5 stars0 ratingsVLSI in Medicine Rating: 5 out of 5 stars5/5Lithography for VLSI: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI and Computer Architecture Rating: 5 out of 5 stars5/5Beam Processing Technologies Rating: 0 out of 5 stars0 ratings
Related ebooks
Lithography for VLSI: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5Laser Annealing of Semiconductors Rating: 0 out of 5 stars0 ratingsLaser Microfabrication: Thin Film Processes and Lithography Rating: 0 out of 5 stars0 ratingsVLSI Metallization Rating: 5 out of 5 stars5/5Beam Processing Technologies Rating: 0 out of 5 stars0 ratingsMaterials and Process Characterization Rating: 0 out of 5 stars0 ratingsAdvanced CMOS Process Technology Rating: 1 out of 5 stars1/5Silicon Integrated Circuits Rating: 4 out of 5 stars4/5GaAs Microelectronics: VLSI Electronics Microstructure Science Rating: 5 out of 5 stars5/5VLSI Handbook Rating: 5 out of 5 stars5/5Plasma Diagnostics: Surface Analysis and Interactions Rating: 0 out of 5 stars0 ratingsAdvanced MOS Device Physics Rating: 0 out of 5 stars0 ratingsSilicon Integrated Circuits: Advances in Materials and Device Research Rating: 0 out of 5 stars0 ratingsChemical and Biochemical Applications of Lasers V2 Rating: 0 out of 5 stars0 ratingsVLSI in Medicine Rating: 5 out of 5 stars5/5Infrared and Millimeter Waves V14: Millimeter Components and Techniques, Part V Rating: 0 out of 5 stars0 ratingsElectrical Properties of Polymers Rating: 0 out of 5 stars0 ratingsSemiconductors Probed by Ultrafast Laser Spectroscopy Pt I Rating: 0 out of 5 stars0 ratingsVLSI Electronics: Microstructure Science Rating: 5 out of 5 stars5/5Semiconductor Materials Analysis and Fabrication Process Control Rating: 0 out of 5 stars0 ratingsMolecular Beam Epitaxy Rating: 0 out of 5 stars0 ratingsCharacterization of Semiconductor Heterostructures and Nanostructures Rating: 0 out of 5 stars0 ratingsSilicides for VLSI Applications Rating: 0 out of 5 stars0 ratingsIII-V Semiconductor Materials and Devices Rating: 0 out of 5 stars0 ratingsMicro-nanoelectronics Devices: Modeling of Diffusion and Operation Processes Rating: 0 out of 5 stars0 ratingsSolution Processed Metal Oxide Thin Films for Electronic Applications Rating: 0 out of 5 stars0 ratingsReliability of Semiconductor Lasers and Optoelectronic Devices Rating: 0 out of 5 stars0 ratingsImpurity Doping Processes in Silicon Rating: 0 out of 5 stars0 ratingsIon Implantation Science and Technology Rating: 5 out of 5 stars5/5
Mechanical Engineering For You
How to Repair Briggs and Stratton Engines, 4th Ed. Rating: 0 out of 5 stars0 ratingsBasic Engineering Mechanics Explained, Volume 1: Principles and Static Forces Rating: 5 out of 5 stars5/5301 Top Tips for Design Engineers: To Help You 'Measure Up' in the World of Engineering Rating: 5 out of 5 stars5/5Mechanical Design Engineering Handbook Rating: 4 out of 5 stars4/5Airplane Flying Handbook: FAA-H-8083-3C (2024) Rating: 4 out of 5 stars4/5Mechanical Engineering Rating: 5 out of 5 stars5/5Troubleshooting and Repairing Diesel Engines, 5th Edition Rating: 3 out of 5 stars3/5Machinery's Handbook Pocket Companion: Quick Access to Basic Data & More from the 31st Edition Rating: 0 out of 5 stars0 ratingsHandbook of Mechanical and Materials Engineering Rating: 5 out of 5 stars5/5Machinery's Handbook Guide: A Guide to Tables, Formulas, & More in the 31st Edition Rating: 5 out of 5 stars5/5FreeCAD Basics Tutorial Rating: 3 out of 5 stars3/5The CIA Lockpicking Manual Rating: 5 out of 5 stars5/5Newnes Workshop Engineer's Pocket Book Rating: 5 out of 5 stars5/5Basic Machines and How They Work Rating: 4 out of 5 stars4/5Mechanical Engineer's Handbook Rating: 4 out of 5 stars4/5Making Things Move DIY Mechanisms for Inventors, Hobbyists, and Artists Rating: 0 out of 5 stars0 ratingsSmall Gas Engine Repair, Fourth Edition Rating: 0 out of 5 stars0 ratingsZinn & the Art of Mountain Bike Maintenance: The World's Best-Selling Guide to Mountain Bike Repair Rating: 0 out of 5 stars0 ratingsThe Art of Welding: Featuring Ryan Friedlinghaus of West Coast Customs Rating: 0 out of 5 stars0 ratingsAirplane Flying Handbook: FAA-H-8083-3A Rating: 0 out of 5 stars0 ratingsRewinding Small Motors Rating: 4 out of 5 stars4/520 Solid State Projects for the Car & Garage Rating: 0 out of 5 stars0 ratingsPlane Sense: A Beginner's Guide to Owning and Operating Private Aircraft FAA-H-8083-19A Rating: 0 out of 5 stars0 ratingsRobotics, Mechatronics, and Artificial Intelligence: Experimental Circuit Blocks for Designers Rating: 5 out of 5 stars5/5Troubleshooting Analog Circuits: Edn Series for Design Engineers Rating: 5 out of 5 stars5/5Oil and Gas Pipelines: Integrity and Safety Handbook Rating: 0 out of 5 stars0 ratings
Reviews for Plasma Processing for VLSI
Rating: 5 out of 5 stars
5/5
1 rating0 reviews
Book preview
Plasma Processing for VLSI - Academic Press
Enjoying the preview?
Page 1 of 1