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    Fundamental Principles of Engineering Nanometrology
    Unavailable
    Fundamental Principles of Engineering Nanometrology
    Unavailable
    Fundamental Principles of Engineering Nanometrology
    Ebook543 pages5 hours

    Fundamental Principles of Engineering Nanometrology

    By Richard Leach

    ()

    Currently unavailable

    Currently unavailable

    About this ebook

    Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
    • Provides a basic introduction to measurement and instruments
    • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
    • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
    • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
    • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
    LanguageEnglish
    PublisherElsevier Science
    Release dateSep 3, 2009
    ISBN9781437778328
    Unavailable
    Fundamental Principles of Engineering Nanometrology
    Author

    Richard Leach

    Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

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