Handbook of Silicon Based MEMS Materials and Technologies
()
Currently unavailable
Currently unavailable
About this ebook
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.
Key topics covered include:
- Silicon as MEMS material
- Material properties and measurement techniques
- Analytical methods used in materials characterization
- Modeling in MEMS
- Measuring MEMS
- Micromachining technologies in MEMS
- Encapsulation of MEMS components
- Emerging process technologies, including ALD and porous silicon
Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.
- Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.
- Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland.
- Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.
- Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.
- Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques
- Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs
- Discusses properties, preparation, and growth of silicon crystals and wafers
- Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Related to Handbook of Silicon Based MEMS Materials and Technologies
Titles in the series (97)
Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering Rating: 2 out of 5 stars2/5Microfluidics: Modeling, Mechanics and Mathematics Rating: 0 out of 5 stars0 ratingsNanotechnologies in Preventive and Regenerative Medicine: An Emerging Big Picture Rating: 0 out of 5 stars0 ratingsSpace Microsystems and Micro/Nano Satellites Rating: 0 out of 5 stars0 ratingsEmerging Nanotechnologies for Diagnostics, Drug Delivery and Medical Devices Rating: 0 out of 5 stars0 ratingsNanotechnology: An Introduction Rating: 5 out of 5 stars5/5Nanoengineered Biomaterials for Regenerative Medicine Rating: 0 out of 5 stars0 ratingsGraphene and Related Nanomaterials: Properties and Applications Rating: 5 out of 5 stars5/5Engineered Nanopores for Bioanalytical Applications Rating: 0 out of 5 stars0 ratingsThermohydrodynamic Programming and Constructal Design in Microsystems Rating: 0 out of 5 stars0 ratingsNanotechnology Applications for Tissue Engineering Rating: 0 out of 5 stars0 ratingsNanotechnology and Nanomaterials in the Treatment of Life-threatening Diseases Rating: 0 out of 5 stars0 ratingsEmerging Nanotechnologies in Dentistry Rating: 0 out of 5 stars0 ratingsLanthanide-Based Multifunctional Materials: From OLEDs to SIMs Rating: 0 out of 5 stars0 ratingsPreparation, Characterization, Properties, and Application of Nanofluid Rating: 0 out of 5 stars0 ratingsNanobiomaterials in Clinical Dentistry Rating: 5 out of 5 stars5/5Micromixers: Fundamentals, Design and Fabrication Rating: 0 out of 5 stars0 ratingsNanomaterials and Devices Rating: 5 out of 5 stars5/5Heat Transfer Enhancement Using Nanofluid Flow in Microchannels: Simulation of Heat and Mass Transfer Rating: 0 out of 5 stars0 ratingsNanomaterials for Biosensors: Fundamentals and Applications Rating: 0 out of 5 stars0 ratingsElectrospinning: Nanofabrication and Applications Rating: 0 out of 5 stars0 ratingsAdvanced Supramolecular Nanoarchitectonics Rating: 0 out of 5 stars0 ratingsApplications of Nanofluid for Heat Transfer Enhancement Rating: 0 out of 5 stars0 ratingsHybrid Nanostructures for Cancer Theranostics Rating: 0 out of 5 stars0 ratingsNanotechnology in Water and Wastewater Treatment: Theory and Applications Rating: 5 out of 5 stars5/5Micro-Drops and Digital Microfluidics Rating: 0 out of 5 stars0 ratingsPhysical Fundamentals of Nanomaterials Rating: 0 out of 5 stars0 ratingsFabrication and Design of Resonant Microdevices Rating: 5 out of 5 stars5/5Assessing Nanoparticle Risks to Human Health Rating: 0 out of 5 stars0 ratingsElectrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology Rating: 4 out of 5 stars4/5
Materials Science For You
Steels: Metallurgy and Applications Rating: 5 out of 5 stars5/5The Art of Welding: Featuring Ryan Friedlinghaus of West Coast Customs Rating: 0 out of 5 stars0 ratingsSkilletheads: <b>A Guide to Collecting and Restoring Cast-Iron Cookware</b> Rating: 0 out of 5 stars0 ratingsElectric Vehicle Battery Systems Rating: 0 out of 5 stars0 ratingsMetalworking: Tools, Materials, and Processes for the Handyman Rating: 5 out of 5 stars5/5Welding Metallurgy Rating: 0 out of 5 stars0 ratingsSurface Preparation Techniques for Adhesive Bonding Rating: 0 out of 5 stars0 ratingsStrength of Materials: A Course for Students Rating: 5 out of 5 stars5/51,001 Questions & Answers for the CWI Exam: Welding Metallurgy and Visual Inspection Study Guide Rating: 4 out of 5 stars4/5Handbook of Fatigue Crack Propagation in Metallic Structures Rating: 5 out of 5 stars5/5The Dynamics of Nazism: Leadership, Ideology, and the Holocaust Rating: 0 out of 5 stars0 ratingsMad About Metal: More Than 50 Embossed Craft Projects for Your Home Rating: 0 out of 5 stars0 ratingsThe Acoustic Reflex: Basic Principles and Clinical Applications Rating: 0 out of 5 stars0 ratingsCrack Analysis in Structural Concrete: Theory and Applications Rating: 0 out of 5 stars0 ratingsChoosing & Using the Right Metal Shop Lathe Rating: 0 out of 5 stars0 ratingsThe Rare Metals War: the dark side of clean energy and digital technologies Rating: 5 out of 5 stars5/5Generalized Continuum Mechanics and Engineering Applications Rating: 0 out of 5 stars0 ratingsThe Electrical Properties of Metals and Alloys Rating: 0 out of 5 stars0 ratingsStretch Blow Molding Rating: 5 out of 5 stars5/5Chemical Metallurgy Rating: 5 out of 5 stars5/5The Reinforced Plastics Handbook Rating: 0 out of 5 stars0 ratingsWelding of Metallic Materials: Methods, Metallurgy, and Performance Rating: 0 out of 5 stars0 ratingsThe Periodic Table of Elements - Alkali Metals, Alkaline Earth Metals and Transition Metals | Children's Chemistry Book Rating: 0 out of 5 stars0 ratingsElectrodeposition of Alloys: Principles and Practice Rating: 0 out of 5 stars0 ratingsEngineering Materials Science Rating: 3 out of 5 stars3/5Additive Friction Stir Deposition Rating: 0 out of 5 stars0 ratings
Reviews for Handbook of Silicon Based MEMS Materials and Technologies
0 ratings0 reviews