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    DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs
    DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs
    DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs
    Ebook353 pages3 hours

    DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs

    By Deborah Munro

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    About this ebook

    This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. 
    LanguageEnglish
    PublisherSpringer
    Release dateNov 25, 2019
    ISBN9783030330736
    DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs

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      Book preview

      DIY MEMS - Deborah Munro

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