Rating: 0 out of 5 stars
0 ratings
Ebook series1 title
Physics of Thin Films Series
Rating: 0 out of 5 stars
()
Currently unavailable
Currently unavailable
About this series
This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma.
- Chapter One develops a unified framework from which all "high-efficiency" sources may be viewed and compared; outlines key elements of source design affecting processing results; and highlights areas where additional research and development are needed
- Chapter Two reviews and analyzes the main types of electron cyclotron resonance (ECR) plasma sources suitable for ECR PACVD of thin films, mainly ECR sources using magnet coils
- Chapter Three examines the benefits and limitations of the new technique, unbalanced magnetron sputtering (UBM), along with the motivation for its development, the basic principles of its operation and commercial applications, and some speculations regarding the future of UBM technology
- Chapter Four describes general phenomena observed in connection with particle formation in thin film processing plasmas; discusses particles in PECVD plasmas, sputtering plasmas, and RIE plasmas; presents an overview of the theoretical modeling of various aspects of particles in processing plasmas; examines issues of equipment design affecting particle formation; and concludes with remarks about the implications of this work for the control of process-induced particle contamination
Titles in the series (1)
- Plasma Sources for Thin Film Deposition and Etching
18
This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma. Chapter One develops a unified framework from which all "high-efficiency" sources may be viewed and compared; outlines key elements of source design affecting processing results; and highlights areas where additional research and development are needed Chapter Two reviews and analyzes the main types of electron cyclotron resonance (ECR) plasma sources suitable for ECR PACVD of thin films, mainly ECR sources using magnet coils Chapter Three examines the benefits and limitations of the new technique, unbalanced magnetron sputtering (UBM), along with the motivation for its development, the basic principles of its operation and commercial applications, and some speculations regarding the future of UBM technology Chapter Four describes general phenomena observed in connection with particle formation in thin film processing plasmas; discusses particles in PECVD plasmas, sputtering plasmas, and RIE plasmas; presents an overview of the theoretical modeling of various aspects of particles in processing plasmas; examines issues of equipment design affecting particle formation; and concludes with remarks about the implications of this work for the control of process-induced particle contamination
Related to Physics of Thin Films
Related ebooks
If I Were Born Here Volume II (Greece, India, Kenya, Mexico, Israel) Morals for Minions Rating: 0 out of 5 stars0 ratingsOrbit: Mark Zuckerberg, Creator of Facebook Rating: 0 out of 5 stars0 ratings20 Million Miles More #0 Rating: 1 out of 5 stars1/5Sherlock Holmes: Victorian Knights #4 Rating: 0 out of 5 stars0 ratingsBreaking Down the Wall Rating: 0 out of 5 stars0 ratingsVincent Price Presents #25 Rating: 0 out of 5 stars0 ratingsThe Forgotten Spoon Rating: 0 out of 5 stars0 ratingsOdyssey Presents: Anthology #2 Rating: 0 out of 5 stars0 ratingsBaneberry Creek: Academy for Wayward Fairies #3 Rating: 0 out of 5 stars0 ratingsFleischer #1 Rating: 0 out of 5 stars0 ratingsSpace Women Beyond the Stratosphere #3 Rating: 0 out of 5 stars0 ratingsglobo arte october issue 2021 Rating: 0 out of 5 stars0 ratingsGlobo Arte July 2022 Issue Rating: 0 out of 5 stars0 ratingsLegend of Isis #10: Volume 2 Rating: 0 out of 5 stars0 ratings100 Hardest Hitting Quotes Rating: 0 out of 5 stars0 ratingsVictoria's Secret Service: Nemesis Rising #2 Rating: 0 out of 5 stars0 ratingsPolitical Power: Portrait Gallery Rating: 0 out of 5 stars0 ratingsEye of the Beholder Rating: 0 out of 5 stars0 ratingsWhitetail Deer Facts and Strategies Rating: 0 out of 5 stars0 ratingsExtreme Rhyming Poetry: Over 400 Inspirational Poems of Wit, Wisdom, and Humor (Five Books in One) Rating: 0 out of 5 stars0 ratingsGood Jokes Bad Drawings Rating: 0 out of 5 stars0 ratingsThe Galactic Traveler: The Story of Enoch Rating: 0 out of 5 stars0 ratingsOdyssey Presents: Anthology #1 Rating: 0 out of 5 stars0 ratingsVincent Price Presents: Black & White #2 Rating: 0 out of 5 stars0 ratingsOrbit: Mikhail Prokhorov Rating: 0 out of 5 stars0 ratingsConfessions for the Narrow Road: It's Within You! Rating: 0 out of 5 stars0 ratingsDell Junior Treasury: Wizard of Oz Rating: 0 out of 5 stars0 ratingsFemale Force: Carrie Fisher Rating: 5 out of 5 stars5/5Twiglet: The Little Christmas Tree Rating: 0 out of 5 stars0 ratings
Materials Science For You
Metalworking: Tools, Materials, and Processes for the Handyman Rating: 5 out of 5 stars5/5Demystifying Explosives: Concepts in High Energy Materials Rating: 0 out of 5 stars0 ratingsWelding Metallurgy Rating: 0 out of 5 stars0 ratingsThe Rare Metals War: the dark side of clean energy and digital technologies Rating: 5 out of 5 stars5/5Skilletheads: <b>A Guide to Collecting and Restoring Cast-Iron Cookware</b> Rating: 0 out of 5 stars0 ratingsElectric Vehicle Battery Systems Rating: 0 out of 5 stars0 ratingsSteels: Metallurgy and Applications Rating: 5 out of 5 stars5/5Crack Analysis in Structural Concrete: Theory and Applications Rating: 0 out of 5 stars0 ratingsThe Art of Welding: Featuring Ryan Friedlinghaus of West Coast Customs Rating: 0 out of 5 stars0 ratingsApplied Welding Engineering: Processes, Codes, and Standards Rating: 0 out of 5 stars0 ratingsThe Dynamics of Nazism: Leadership, Ideology, and the Holocaust Rating: 0 out of 5 stars0 ratingsChoosing & Using the Right Metal Shop Lathe Rating: 0 out of 5 stars0 ratingsSurface Preparation Techniques for Adhesive Bonding Rating: 0 out of 5 stars0 ratingsPolymer Characterization: Laboratory Techniques and Analysis Rating: 0 out of 5 stars0 ratingsGeneralized Continuum Mechanics and Engineering Applications Rating: 0 out of 5 stars0 ratingsCivil Engineering Materials: From Theory to Practice Rating: 0 out of 5 stars0 ratingsHandbook of Adhesion Rating: 0 out of 5 stars0 ratingsHandmade: A Scientist’s Search for Meaning through Making Rating: 1 out of 5 stars1/5Bioimpedance and Bioelectricity Basics Rating: 5 out of 5 stars5/5Micro- and Nanoengineering of the Cell Surface Rating: 0 out of 5 stars0 ratingsThe Reinforced Plastics Handbook Rating: 0 out of 5 stars0 ratingsStrength of Materials: A Course for Students Rating: 5 out of 5 stars5/5Essential Rubber Formulary: Formulas for Practitioners Rating: 3 out of 5 stars3/5Non-Destructive Testing Rating: 4 out of 5 stars4/5Applications of Graphene and Graphene-Oxide based Nanomaterials Rating: 2 out of 5 stars2/5Welding of Metallic Materials: Methods, Metallurgy, and Performance Rating: 0 out of 5 stars0 ratingsAn Introduction to Metallurgical Laboratory Techniques: Pergamon Series of Monographs in Laboratory Techniques Rating: 0 out of 5 stars0 ratings
Related podcast episodes
Ep 32: My First Lifestyle Party PART 1 0% found this document usefulSea of Thieves Griefing Woes with Kahlief Adams - What's Good Games Podcast (Ep. 45) 0% found this document usefulSea of Thieves Griefing Woes with Kahlief Adams - What's Good Games Podcast (Ep. 45) 0% found this document useful
Related categories
Reviews for Physics of Thin Films
Rating: 0 out of 5 stars
0 ratings
0 ratings0 reviews