Unavailable
Unavailable
Unavailable
Ebook680 pages14 hours
Handbook of Silicon Wafer Cleaning Technology
By Werner Kern
Rating: 0 out of 5 stars
()
Currently unavailable
Currently unavailable
About this ebook
The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included.
- Focused on silicon wafer cleaning techniques including wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits
- As this book covers the major technologies for removing contaminants, it is a reliable reference for anyone that manufactures integrated circuits, or supplies the semiconductor and microelectronics industries
- Covers processes and equipment, as well as new materials and changes required for the surface conditioning process
- Editors are two of the top names in the field and are both extensively published
- Discusses next generation processing techniques including supercritical fluid, laser, and cryoaerosol
Unavailable
Related to Handbook of Silicon Wafer Cleaning Technology
Technology & Engineering For You
The Big Book of Hacks: 264 Amazing DIY Tech Projects Rating: 4 out of 5 stars4/5The Art of War Rating: 4 out of 5 stars4/5A Night to Remember: The Sinking of the Titanic Rating: 4 out of 5 stars4/5Longitude: The True Story of a Lone Genius Who Solved the Greatest Scientific Problem of His Time Rating: 4 out of 5 stars4/5Vanderbilt: The Rise and Fall of an American Dynasty Rating: 4 out of 5 stars4/5The Big Book of Maker Skills: Tools & Techniques for Building Great Tech Projects Rating: 4 out of 5 stars4/5The Art of War Rating: 4 out of 5 stars4/5The Invisible Rainbow: A History of Electricity and Life Rating: 4 out of 5 stars4/5Ultralearning: Master Hard Skills, Outsmart the Competition, and Accelerate Your Career Rating: 4 out of 5 stars4/5Logic Pro X For Dummies Rating: 0 out of 5 stars0 ratingsThe Right Stuff Rating: 4 out of 5 stars4/5The 48 Laws of Power in Practice: The 3 Most Powerful Laws & The 4 Indispensable Power Principles Rating: 5 out of 5 stars5/5Selfie: How We Became So Self-Obsessed and What It's Doing to Us Rating: 4 out of 5 stars4/580/20 Principle: The Secret to Working Less and Making More Rating: 5 out of 5 stars5/5Artificial Intelligence: A Guide for Thinking Humans Rating: 4 out of 5 stars4/5The Fast Track to Your Technician Class Ham Radio License: For Exams July 1, 2022 - June 30, 2026 Rating: 5 out of 5 stars5/5The Systems Thinker: Essential Thinking Skills For Solving Problems, Managing Chaos, Rating: 4 out of 5 stars4/5The ChatGPT Millionaire Handbook: Make Money Online With the Power of AI Technology Rating: 0 out of 5 stars0 ratingsA History of the American People Rating: 4 out of 5 stars4/5How to Disappear and Live Off the Grid: A CIA Insider's Guide Rating: 0 out of 5 stars0 ratingsThe CIA Lockpicking Manual Rating: 5 out of 5 stars5/5Death in Mud Lick: A Coal Country Fight against the Drug Companies That Delivered the Opioid Epidemic Rating: 4 out of 5 stars4/5The Complete Titanic Chronicles: A Night to Remember and The Night Lives On Rating: 4 out of 5 stars4/5U.S. Marine Close Combat Fighting Handbook Rating: 4 out of 5 stars4/5Understanding Media: The Extensions of Man Rating: 4 out of 5 stars4/5Electrical Engineering 101: Everything You Should Have Learned in School...but Probably Didn't Rating: 5 out of 5 stars5/5
Reviews for Handbook of Silicon Wafer Cleaning Technology
Rating: 0 out of 5 stars
0 ratings
0 ratings0 reviews