Discover millions of ebooks, audiobooks, and so much more with a free trial

Only $11.99/month after trial. Cancel anytime.

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications
Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications
Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications
Ebook419 pages4 hours

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

Rating: 0 out of 5 stars

()

Read preview

About this ebook

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
LanguageEnglish
PublisherWiley
Release dateMay 17, 2013
ISBN9781118747384
Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

Related to Atomic Layer Deposition

Related ebooks

Materials Science For You

View More

Related articles

Reviews for Atomic Layer Deposition

Rating: 0 out of 5 stars
0 ratings

0 ratings0 reviews

What did you think?

Tap to rate

Review must be at least 10 words

    Book preview

    Atomic Layer Deposition - Tommi Kääriäinen

    :Hdbook_preview_excerpt.html\͒q~D IQ$LRaf=]î]  / )]'q~Y==UYYeV=?x_vgZ<G<~<\0|ܹ^|Gz`lfhFz3t;ᓩٹ?f0? O6ڦ'D̃Hoo }t1d 0P ^1l 9Ws4m`imCNLD`Goh0oifͽ#"δ|$bqkdžo\,B۝mH5~2b4q@Lcf.?0]5,^0LyۻpAͶ#֘qrmoYm%<1isG>&@acW یӋB+ M=&LKk }9V;Gu$'O/a1)m}4 D{(5 mi*;0aGRrR ';{fdakOٱ?CX'tG_a/G3ħaƨ7O~JʃC%]n#KeclnEѾ\{ R l7fekOa}޶soKZ2PD,a䓦{p62G!?7OobZ8 0l}YD|GKujw[uJrLϱs,hvXsCGfN)?3hv6 րX(%6dNħxai~a&;5SOVa:ڠ|eûotEP fx(;)6d~aEԓb/zJ쨚o,1lE?4ĐL.X#yK;tĺAid=mlIݴ<FZWZ nylMˢM J,{ߋU%[^d&vXU+H@ ABL,Ni$3HE#Wfc~f"if'1ZY)h!IBGᥘ.6O@Sb> %ݽ3/p21>Ɇ$2'o΁V J/'#%c Aqoxi"pގ<'n? q sbk֭el'L*v NNDܮK@~bڎʸTCھᖼdU-%!`5&qX!I)>I0~[)Lb1d-@vCd?<O#Ԑ ݑ6X4Oi7{~|OD"!ZW(Ks!i~w 5Z+wGԊVʞHwb$Z M\֡ƆBZ& "k~;;T΄F3hjwe@þdX´'zI($$TQ2wXɽoyޡ?S8Xi;nڸ>z7ot,ؓQ$C2hk~Azj/,2bq"eiaUy+=IIߊQ!'VfEA.44~hGŪKRpAP>`ɒ+cg1lm3zY~Fg$9& 2}P.>i.[Ƒ <^dPl/8|,MH- E6o@d>2dxF]R,} ڃwch{oZQ_0@#C66Zf<4׬+}!;ⓘ(e^coW  vw}uMo <[N&xDXOS;C"Qv߳-鏨HfԆS^Lmt{Kct\F(#nb G0)6y5)haMdSv")?Ei5]7RTr:#(0;J7szXRZX1bQce@82h2)n]ВyC$5mB`HetˬdF0g,kǔ& 8Fp0iPЄAψiU5BM&K焹0|> FIoJ=ͻ&Ak9,<6]Ɂ,&o>Q]"d{, B(:)^Dlڜ>*3q^jpae}Tꭐq-舏_H/F;h6tIċ.᱖md6_xᓤULO^ʷ$ I"1DPJcs6ɀV7J(uq?l*=V>c-T$0TͿjJNWKU*NF?fk XfDTW&k"H֮D,'*J ҁl-s[ 3O@GVlg9K1Dxhr^i8IC(=@ I';hǪ4ohPbSV|:3 =WzR-ndc[IbHdE @D_`I& RNdI97B0`my~ 1F)Zc$٥pI;S/49K,wG)"Bx\`*yI^a'wp8pg}t;h䛰_dEPFPS+(~QT7$]ȴR;'> MVc4.XA͊#񅲭hI7D9L`)iˤ&RHbT ya rVۍT%2+W}GUGjLB֟hڍ*p&@Bxp1>$߬ޓQހ.nǗ;Ǐ/̐<rG\3+\!垴 ڿ)Y$aþ~F:( 1zE.QS++Ќ[ܐQ-7 L￑MnR]䆝0apR%'C*DjiEZ'x#mNP!"B<bKPpiW)RsvnJm5P20dR$ެjK#(TXLV~GX3Z3 2X\9-0'\ @c e)W {z %v.t$9ڼŜiIn߁lȘ=de4#~^unڍQrm@_EZ[n/{hf /?j4C11teuԢIk7Xpj<<ێd72 KXTͺ@V`̒A8/\8KE7PQ>Jhg1sظ>(_SU[ǝЅ+^Gn(IErKw1;QvI+4HOg5)-2`Jev  GʠAa'k9.ꡒ,Vh:W4DZn2֛-P= !޳D$,&^ND>3we4]{U/2$r#dB+{gr Σ 8$YZ.Gs3CMYHG?8wI&uRzK7 &]̺^+!XL77(oIR{,q Wq69NQfio^֎0$nΏEb:h8 wvRSεŒ a=;j7=hM0 1gi &]i.;1:09ֻIO^q)匉G"+֙M*z#'F2lI+Ctq+.̓t@U TIW +HK+}3QcD\WW p,t΄<7yTѿޫ+W.!`ڸm;`Ko8XtqE2 -B'UAasKܩMRhkt<'u1nQTU55:I|v|H|ϖ}W94$4+Kt^j9M1+ZAy+r PH/}˥d\O,@͏CU*z_ ;MR^{(bO_ٵ?:~' M*z$ >|F|o_T?:sꀚt\ Z@YS[ؽk22^(" >i匱&,k\*&>W`~t9w[Μ>VtV78(5{no{b]Lֵz{Ǎs,sh p0>w\毋)T;)iA -7D˩8"w4lėS}@]ͤv+SvAA;K eܷJkKJ8TVbٕiBN7_~v4 @ UVue)P0*4 #uFԐm!DFx%maѓ Djx U,m,j+{kdn0呃 "_X:#+uo5jhç b[wZ%쭔܎짟77Oo?{qVSw#zM ZmאַrT]ҹ'˃NPT޿w8c.s;r҉Ƹڧ-8tK* Ke ܯTGIyk^5BF }+ok߅*[+WGYbW/gȸ`ުv{<^-铣6}+b Z,%}$D?xS6zVMwΨlU`㷛2zt?<.Ϩ ߕfD!hGH4pfͰ?iGݾc&Wt0B VUlbXnSvJ3R*-іmKgӴƃ6 ͡{M"gߋ+,1kxy/SH'׿n]ʡU%#r=ȿlx_TSMi"\7 |zS= HgE'NUZ.$jlC 9H WNvyp@ij*bLl:*\E<0Awݲ?Ͽ)![ȯo 9<~,`'7(UM.ܡw1gdc̤gJ=Sp9;GMhBӿ߼XcvVMڼ𖜂p:30X.$CEhc(.¥l]OKe|3 06=W5\ͽ~~[|˄h#WW23|Vz~Y/u#< E?,xBtȬ*8|r/ )̒ JI}SEl=/u9ͣ 7{FBf*mBDq~ż!Bj5\Lb%Se/j}"wmbB$/?ZT6*%_Y]7+[bǖBѫvns"gBV5y Xf GȗːŎp :of/%Vk3$(Vt9׆`^F+2Y^/NqU#w]Gn-of4z$TUel铛mƥHu?`&ȥ w68)?of_rE79 N rQvW;8 [+<)W `/žKH'=AQQT^dÎcK݋>:ӇAjh,>CjE#5/ &cJ9ߛ׉iu{VoD1%8 nQ7X̃^r7U>PQ!sMb,!Ҳ L k HRRr>&xOL f?{^b
    Enjoying the preview?
    Page 1 of 1